Micropatterning and Bonding Lab
• Mask Aligner from Karl Suess
![© Max-Planck-Institute for Solid-State-Research](/6271112/original-1518437346.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzExMTJ9--975c713229f6806d1756b3fb904a3d1bfde2bf0a)
© Max-Planck-Institute for Solid-State-Research
• Computerized photoresist spin coating system.
![© Max-Planck-Institute for Solid-State-Research](/6271123/original-1518437346.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzExMjN9--7c17217432637a127667a638f56d8a09a32ee202)
© Max-Planck-Institute for Solid-State-Research
• Ion etching System with endpoint detection by high resolution mass spectroscopy
![© Max-Planck-Institute for Solid-State-Research](/6271134/original-1518437346.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzExMzR9--6d8d01adca2ba6c0cf155686e1eb1e5ac279b284)
© Max-Planck-Institute for Solid-State-Research
• Profilometer (Bruker DektakXT)
![© Max-Planck-Institute for Solid-State-Research](/6271145/original-1518437346.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzExNDV9--c7aee7a08d7fc0fa404e6e2bd5375327e55c94f5)
© Max-Planck-Institute for Solid-State-Research
• Ultrasonic wire bonding machines (Wedge and Ball bonding)
![© Max-Planck-Institute for Solid-State-Research](/6271156/original-1518437346.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzExNTZ9--7b5cab9e96d09db974d4a60c7ec080d4b845d1ca)
© Max-Planck-Institute for Solid-State-Research