TEM Comparison Table

	ARM200F Probe Corrected	ARM200F Image Corrected	Philips CM200	Zeiss 912 Omega
Acc. Voltage	60kV, 80kV, 200kV	60kV, 80kV, 200kV	200kV	120kV

HRTEM (Scherzer resolution)	0.19 nm	0.10 nm	0.27 nm	0.37 nm

STEM	0.078 nm	0.136 nm	-	-

X-ray analysis (spatial resolution)	< 1 nm	1 nm	–	–

EELS analysis spatial resolution energy resolution	0.2 nm – 0.3 eV	0.5 nm – 0.3 eV	– – –	parallel >20 nm 0.9 eV

Maximal tilt angle	20°/20°	20°/20°	60°/30°	60°/30°

Heating stage (max. temperature)	900 °C	900 °C	–	-

Cooling stage	–160 °C	–160 °C	–160 °C	–160°C

Energy-filtering TEM	yes	yes	–	yes

Z-contrast	yes	yes	–	–

Energy-filtered diffraction	yes	yes	–	yes