FEI FIB SCIOS

Our FIB-SEM system FEI SCIOS is mainly used for site-specific and high-precision preparation of TEM lamellae. The SCIOS has a SE, a BSE and a STEM detector for imaging with a SEM resolution of approximately 1 nm and FIB resolution about 5 nm. The specimen stage can be tilted from -15° to +90°.

A vacuum transfer system for air-sensitive specimen materials is available, which allows the complete workflow from FIB preparation to TEM investigation to be done without breaking vacuum or inert gas conditions and avoiding contact with air and humidity. Further, we have a cooling stage available, which allows FIB milling at cryogenic temperature for materials that are heat- or beam-sensitive.

For analytical purposes, the SCIOS is equipped with an EDX detector and EBSD camera (EDAX) for chemical and orientation analysis as well as with an EBIC system by Oxford Instruments.